Robot maker · registered
Fabmatics
Dresden cleanroom-automation specialist (300+ staff, 30+ year semiconductor lineage; Fabmatics GmbH formed by 2016 merger of HAP and Roth & Rau Ortner, today part of the SCIO Automation group) building the HERO family of cleanroom mobile robots: HERO Rail intra-bay loaders born from a 2009 Infineon commission (120+ systems in Infineon Dresden within three years), free-navigating HERO Fab AMR (2015; 100th unit delivered March 2024) and HERO Scout reticle-handling AMR. Modern product line is autonomous mobile manipulation for 200mm/300mm wafer fabs.
Company overview
Identity and operating footprint
Robot models
Specifications remain vendor-claimed
HERO Fab
- Free-moving cleanroom AMR for wafer-cassette transport and machine loading; 100th unit delivered March 2024
Cleanroom-certified autonomous mobile robot with onboard manipulator
Claim source
HERO Scout
- Compact AMR for automated reticle handling and transport in semiconductor cleanrooms
Reticle-handling autonomous mobile robot
Claim source
Deployment log
Announced and cited only
Company timeline
Milestones and announcements
Source ledger
3 unique public sources